Algorithm for Accurate Capacitance Matrix Measurements of the Multiconductor Structure for Vlsi Interconnections

The demand for computer simulation of multiconductor interconnections in VLSI structures necessitates that such structures should be modelled. Calculations of the model capacitance matrix from measurements, for the multiconductor transmission lines which are coupled interconnections in a VLSI structures, using the "two-terminal" capacitances indirect measurement procedure is strongly corrupted by the measuring errors. Sensitivity analysis and error propagation relations demonstrates it. The paper presents alternative method for direct capacitance measurements in the multiconductor structure using active separation of the capacitance network to increase the measurements accuracy.